2D vertical-cavity laser arrays for free-space and multimode fiber transmission systems

We have fabricated single and multiple wavelength 2D vertical-cavity surface-emitting laser arrays with a 30 /spl mu/m pitch. The center wavelength is around 980 nm. The 4/spl times/4 single wavelength laser arrays shows threshold currents of 570 /spl mu/A and maximum output power levels of 1.05 mW with good uniformity. The 4/spl times/2 multiple wavelength arrays exhibit a total wavelength span of 17 nm with minimum threshold currents of 720 /spl mu/A and maximum output powers of 0.46 mW. The wavelength distribution within the laser array is totally arbitrary. The fabrication of the multiple wavelength laser array employing anodic oxidation and molecular beam epitaxy regrowth is described.