Dual Mode Neural Probe with Enhanced Microstructure for Neural Stimulation and Recording

This paper presents a dual mode neural probe with enhanced microstructure electrode to improve the electrical stimulation and electrophysiology recording performance. The cylinder and cube microstructures with the depth of 1.5 µm are realized by inductively coupled plasma (ICP) etching. Electrochemical characterization indicates the electrode with cube microstructure obtains the largest charge storage capacity (CSC) compared to cylinder and planar one. Meanwhile, the impedance of cube electrode decreases down to 0.9 kΩ at 1 kHz after platinum black modification. The animal experiments reveal the neurons in primary motor cortex would be activated by electrical stimulation. Meanwhile, the electrode with cube microstructure is qualified to neural signal recording in the deep brain. This dual mode neural probe with enhanced microstructure is dedicated to neuroscience research and neurological disease treatment.