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Effect of the structure on the electrophysical parameters of silicon carbide films on silicon
Effect of the structure on the electrophysical parameters of silicon carbide films on silicon
1989
S. I. Vlaskina
A. N. Ziuganov
P.S. Smertenko
V. P. Sobolevskii
Keywords:
Solid-state physics
Materials science
Microstructure
Silicon carbide
Thin film
Silicon
Optoelectronics
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