Applications of spark-source mass spectrometry for localized microanalysis, film analysis and depth analysis

Abstract Spark-source mass spectrometry, which is a typical bulk analysis technique, can also be used to study lateral profiles extending over millimeter distances, and for in-depth, layer and microsample analysis. Such analyses require knowledge of the influence of instrumental parameters such as breakdown voltage, pulse repetition frequency, pulse length and slit settings on the material consumed per spark pulse or per unit time, on the crater dimensions and on the ion yield. A study for over 20 matrices is reported. Applications are for lateral analysis (diffusion profile of beryllium in a Cu/CuBe diffusion couple), in-depth analysis (diffusion profile of nickel in copper), layer analysis (carbon in 3-μm gold layers, 3-μm GaAs epitaxial layer) and of microsample analysis (water residues). The effect of the amount of material sampled per analysis on the obtainable precision is demonstrated.