Novel Si-based nanowire devices: Will they serve ultimate MOSFETs scaling or ultimate hybrid integration?
2008
Both CMOS scaling and NEMS sensor devices scaling converge to the same type of sub 100 nm objects. This opens new fields of application for IC chips integrating both complex signal treatment and very highly sensitive sensing functionalities.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
7
References
43
Citations
NaN
KQI