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Review of Plasma-Based Etch Treatment in Dielectric Etch Processes
Review of Plasma-Based Etch Treatment in Dielectric Etch Processes
2013
Qiuhua Han
Xinpeng Wang
Junqing Zhou
Minda Hu
Hai-Yang Zhang
Keywords:
Dielectric
Plasma
Analytical chemistry
Materials science
Optoelectronics
Correction
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