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The adsorption of AlCl 3 and incorporation of Al on Si(100) for Atomic Precision Fabrication
The adsorption of AlCl 3 and incorporation of Al on Si(100) for Atomic Precision Fabrication
2021
Azadeh Farzaneh
Sungha Baek
Matthew S. Radue
Kevin Dwyer
Yifei Mo
Robert J. Butera
Keywords:
Adsorption
Fabrication
Chemical engineering
Materials science
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