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Single and Double Diffusion Breaks in 14nm FinFET and Beyond
Single and Double Diffusion Breaks in 14nm FinFET and Beyond
2017
Kenichi Miyaguchi
F. M. Bufler
Thomas Chiarella
Philippe Matagne
Naoto Horiguchi
An De Keersgieter
Geert Eneman
Alessio Spessot
Bertrand Parvais
Diederik Verkest
Anda Mocuta
Keywords:
Materials science
double diffusion
Condensed matter physics
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