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Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
2008
Eddy Simoen
Antoine Brugère
Alessandra Satta
Benny Van Daele
Bert Brijs
Olivier Richard
Jan Geypen
Marc Meuris
Wilfried Vandervorst
Keywords:
Radiochemistry
Germanium
Phosphorus
Epitaxy
Materials science
Analytical chemistry
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