Laser microplasma as a spot tool for glass processing: focusing conditions

Abstract Indirect laser-based surface nano- and microprocessing of optical materials demonstrate promising applications in microoptics, microfluidics and electrofluidic. The methods principle is based on the conversion of laser energy to a plasma plume, which effectively and precisely etchуы the glass backside. However, there are a lot of variable occurs during fabrication, which we discuss in this research to improve the processing quality and maintain the repeatability of the LIMP method. Experimental methodologies supported with geometrical calculations of a plasma plume expansion and calculation of a laser beam distortion by the microlens formed on the glass backside are presented. The study contributes to understanding the importance of experimental conditions - an air gap and focus plane position. The results make LIMP method to be robust, low-cost, and easily implementable in the industry.