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Workfunction Tuning of B Doped Fully-Silicided Pd2Si Gate
Workfunction Tuning of B Doped Fully-Silicided Pd2Si Gate
2007
Shiraishi Hiroyuki
Hosoi Takuji
Ohta Akio
Miyazaki Seiichi
Shibahara Kentaro
Keywords:
Doping
Optoelectronics
Materials science
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