Charged particle beam measurement device

The invention discloses a charged particle beam measurement device, which comprises an array insulating board, a plurality of charged particle collection units, a total electrical charge collecting board, an insulation pad, an outer cylinder, and a back cover. On the array insulating board are provided the plurality of charged particle collection units and a total electrical charge collecting board. The charged particle collection unit and the total electrical charge collecting board each are provided with a conductive channel penetrating through the entire array insulating board. Any two charged particle collection units are in electrical insulation, and any one of the charged particle collection unit and the total electrical charge collecting board are in electrical insulation. The inventive device contains an array composed of a plurality of charged particle collection units, and can measure the position and the profile of a pulse or a direct current charged particle beam according to the intensity of the charges collected by the charged particle collection units at various positions.