The substrate processing apparatus, a storage medium storing a substrate processing method and program

A cluster controlling devices of a plurality of the same kind on the basis of the interlock signal. A substrate processing system 10, if the most PC100 and predetermined interlock condition is satisfied and outputs a serial signal for controlling the PM, has a safety PLC300 outputting an interlock signal. The PM of the substrate processing system 10, a plurality of APC valve of the same type are provided, as is a plurality of APC valve operates in conjunction with or unsynchronized with one another, one of the state of the interlocking or non-interlocking for each device It is selected. Safety PLC300, when it is determined to have been met given interlock condition, and outputs an interlock signal indicating abnormality. If any of the plurality of the APC valve enters the interlock signal, all of the APC valve, regardless of either interlocking or non-interlocking, operates in conjunction in accordance with an instruction of the interlock signal. .FIELD 4