Sensor device and sensor device

Sensor device a vibrator (20) which is slidably supported with respect to a substrate (10), a plurality of pairs of electrodes (51-1 to 51-4, 52-1 to 52-4, 53-1 to 53-4, 54-1 to 54-4, 55-1 to 55-4, 56-1 to 56 -4), each having a movable electrode (32a1 to 32A4, 32b1 to 32b4, 21a1 to 21a4, 22a1 to 22a4, 32c1 to 32c4, 23a1 to 23a4, 23b1 to 23b4) that is connected to the vibrator (20) and the together with the vibrator (20) to the substrate (10) is displaced, and a fixed electrode (51a1 to 51a4, 52a1 to 52a4, 53a1 to 53a4, 54a1 to 54a4, 55a1 to 55a4, 56a1 to 56a4) have, on said substrate (10) is mounted so as to movable electrode (32a1 to 32A4, 32b1 to 32b4, 21a1 to 21a4, 22a1 to 22a4, 32c1 to 32c4, 23a1 to 23a4, 23b1 to 23b4) that faces, and a plurality of conductors ...