가상모드 입력성형기를 이용한 위치결정 스테이지 잔류진동 저감

This paper presents an experimental result of virtual mode input shaping for positioning stage. Input shaping is liable to increase the rise time of the system, which often degrades the performance of system. The virtual mode input shaping is an input shaper design method to improve this problem. Experiments are performed with a precise positioning stage with a flexible beam of which natural frequency is adjustable. The experimental results show that the virtual-mode input shaper is useful to reduce the rise time as well as the residual vibration of precise positioning stages.