Molecular dynamics study on carbon film deposition

Abstract Hydrogen-free carbon film deposition is studied through molecular dynamics (MD) simulation. MD simulation is performed for low-energy carbon particle impacts on carbon surfaces at room temperature. Deposition energy is considered up to E  = 100 eV per carbon atom. Deposited surface is set into amorphous, and (1 1 1) surface of diamond crystal is considered in order to compare. For (1 1 1) surface, we found three characteristic regions. The deposition frequently results in the shallow trapping in E  ⩽ 20 eV. In E  ⩾ 30 eV, the deep trapping occurs about normal incidence, and the reflection appears about grazing incidence. For the amorphous surface, however, the reflection and the deep trapping are suppressed.