Preparation of polymer films from hexamethylcyclotrisilazane in the plasma of high-frequency discharge☆

The effect of the HF discharge power and substratum temperature on the rate of propagation of hexamethylcyclotrisilazane films has been studied. Intense fragmentation of monomer molecules takes place in the plasma of the HF discharge with hydrogen abstraction, methyl group separation and termination of the silazane ring. Polymerization on the surface takes place by the combination of SiCSi and SiNSi. The concentration of NH and SiH groups increases with an increase in the power of discharge.