Extension of CD-TEM towards 3D Elemental Mapping
2020
We show how a CD-TEM (Critical Dimension-Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most elements in the sample. This is achieved by developing a recipe using ordinary commands also used in CD-TEM programming. In addition, we demonstrate how detector shadowing can be reduced significantly by using a special specimen holder and modified grids. The recipe, which runs autonomously and automatically, is verified using examples from modern FinFET and non-volatile memory devices.
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