Development of scroll vacuum pump characteristics by thermal deformations compensation

Influence of thermal deformations of scroll vacuum pumps working elements on clearances in working mechanism is considered. Analysis of influence of a clearance value on indicator diagrams and pumping speed was carried out. It is shown that alteration of a clearance due to thermal deformations decreases pumping speed at low pressures. The design of scroll elements compensating clearances alteration in pump operation and improving pumping characteristics is presented.