Electrical properties of plasma-polymerized C:H films

Abstract Ac electrical properties of the dielectric part—hard hydrocarbon plasma polymer C:H of the composite Ag C:H prepared by an unbalanced magnetron were investigated. Capacitance and dielectric losses tg δ of the C:H film sandwiched between the two Al thin film electrodes and measured without breaking vacuum at a single frequency (1592 Hz) decreased considerably with time. In addition ac conductivity of the C:H film within 10 min after its deposition was measured in the frequency range 10 – 10 4 Hz. An explanation in terms of post deposition trapped free radical reactions resulting in their decay is given. This is supported by FTIR absorption measurements.