Progress in the multi-trigger resist

Traditional resists will support the initial EUV insertion but more novel resists are being sought for future nodes. Irresistible Materials is developing resists based on the multi-trigger concept. In a multi-trigger resist multiple elements of the resist must be simultaneously activated to enable the catalytic reactions to proceed. In high dose areas the resist therefore behaves like a traditional CAR, whilst in low dose areas, such as line edges, the reaction is second-order increasing the chemical gradient. Here we present further developments of the high-Z MTR resist, including sub-2 nm LER at p32.