Ni compound and method of forming thin film

Nickel compound has a hetero structure including a nickel amidinyl carbonate (amidinate) ligand, an aliphatic alkoxy group (aliphatic alkoxy group). In the thin film forming method using a nickel compound of the hetero structure comprising a ligand and a nickel amidinyl carbonate, an aliphatic alkoxy group to form a nickel-containing film on the substrate.