A new method for determining the efficiency of laser radiation conversion into 13.5 ± 0.3 nm radiation in laser-plasma extreme ultraviolet sources

We have studied extreme ultraviolet (EUV) emission from a laser-plasma source employing a supersonic xenon jet as the target. The output EUV energy has been determined as a function of the laser pulse energy for the supersonic xenon jet in comparison to the solid metal (Cu, Mo, Ta) targets. Based on these results, a new method for determining the efficiency of laser radiation conversion into EUV radiation is proposed, which ensures unambiguous characterization of the properties of various targets. Ways to optimize the xenon jet source are discussed.