Improved Peformance of Micro-Preconcentrator Using Silicon Nanowires as a Surface Template

In this paper, silicon nanowires (SiNWs) with high specific surface area were used as a surface template to improve the enrichment ability of micro-preconcentrator (μPC). The μPC was fabricated based on MEMS technology. The SiNWs were grown in-situ on the surface of the cavity of the μPC, and then the Tenax-TA was coated. The enrichment abilities of VOCs of the μPC with Tenax-TA and Tenax-TA using SiNWs as a surface template (SiNWs + Tenax-TA) were respectively measured. The enrichment ratio of butyl acetate of the μPC with Tenax-TA was 67.4, and the μPC with SiNWs + Tenax-TA was 193.8, which had an enhancement as high as 188%, suggesting that SiNWs as the surface template of Tenax-TA effectively enhanced the enrichment ability.