MOCVD法によるCa-Ti-OおよびCa-P-O系傾斜機能バイオセラミックス膜の合成

Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (RCa/Ti) and Ca to P (RCa/P) precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub=973 and 1073 K. CaTiO3 films prepared at Tsub=873 K had a dense and smooth surface. CaTiO3 films prepared at Tsub=1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at Tsub=973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO3 film, while 14 days on the α-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.