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New nano-patterns generated by the self-assembling of PS spheres during ICP etching
New nano-patterns generated by the self-assembling of PS spheres during ICP etching
2013
Yingfeng Li
Meicheng Li
Dandan Song
Hang Yu
Fan Bai
Keywords:
Dry etching
Etching
Nano-
Nanotechnology
Reactive-ion etching
Composite material
Materials science
SPHERES
Correction
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