Michelson Interferometer for near Infrared Wavelengths

This paper presents an architecture to simplify a Michelson Interferometer, designed with MEMS technology in order to obtain the near infrared wavelengths in the range of [1620-1800 nm], which will be used in a non-invasive micro sensor of glucose. The input interferometer is fed with a white light source. The poli-silicon, superficial and bulk processes are utilized to design the architecture. The interferometer is based on dividing the design into three parts formed by two gears, a zipper and two mirrors at 90° each of one, for achieving resolution improvement without decreasing mechanical resistance of the parts. Each part is modeled mathematically and their behavior is verified using different analysis in-SolidWorksTM. On the other hand, the beamsplitter of the Michelson Interferometer is placed at 45° with respect to mirrors. The simulation results demonstrate the validity of the behavior of interferometer proposed.