Hybrid Numerical Simulation of Electrostatic Force Microscopes Considering Charge Distribution

The electrostatic force microscope (EFM) is an important tool for imaging and characterizing material surfaces. In this paper a hybrid numerical approach for the simulation of the EFM considering charge distribution inside the sample under investigtion is presented. In the simulation model electrical part is considered. In this paper flrst a basic knowledge on the EFM and then the numerical model of the EFM considering volume charge distribution are presented. At last several numerical simulation results of the EFM in 3D are pesented.