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A possible origin of the large leakage current in ferroelectric Al1−x Sc x N films
A possible origin of the large leakage current in ferroelectric Al1−x Sc x N films
2021
Junji Kataoka
Sung Lin Tsai
Takuya Hoshii
Hitoshi Wakabayashi
Kazuo Tsutsui
Kuniyuki Kakushima
Keywords:
Ferroelectricity
Leakage (electronics)
Materials science
Condensed matter physics
Correction
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