Irradiation-induced nano-voids in strained tin precipitates in silicon

We report on self-assembling of spherically shaped voids in nanometer size strained Sn precipitates after irradiation with He+ ions in different conditions. It is found that high-temperature irradiation induces vacancies which are collected by compressively strained Sn precipitates enhancing of out-diffusion of Sn atoms from the precipitates. Nano-voids formation takes place simultaneously with a β- to α-phase transformation in the Sn precipitates. Post-irradiation thermal treatment leads to the removal of voids and a backward transformation of the Sn phase to β-phase. Strain-enhanced separation of point defects along with vacancy assisted Sn out-diffusion and precipitate dissolution are discussed.