Split-rings for heterogeneous integration of mm-Wave systems

Split-ring resonators (SRRs) are one of the fundamental building blocks of electromagnetic metamaterials. These structures play a key role in the development of future millimeter-wave (mm-Wave) components and systems. In this work, we present a study on the scaling of split-ring resonators and their models to mm-Wave frequencies with special focus on their use in heterogeneous packaging and system-integration. We model, simulate, design and measure different configurations of SRRs. Very good correlation is obtained between the analytical calculations, simulation and measurements. Finally, we investigate the impact of process variations, which occur during fabrication of the resonators.