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Oxygen adsorption and electrical behaviour of thin, very-low-pressure chemical-vapour-deposited polysilicon films
Oxygen adsorption and electrical behaviour of thin, very-low-pressure chemical-vapour-deposited polysilicon films
1992
B. Fortin
D. Mostefa
F. Raoult
Hervé Lhermite
M. Sarret
Keywords:
Adsorption
Oxygen
Materials science
Inorganic chemistry
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