Development of quantum hall array resistance standards at NMIJ

A quantum Hall array resistance standard (QHARS) device with a nominal value close to 10 kΩ on the i = 2 plateau has been developed on a GaAs/AlGaAs heterosubstrate. This QHARS device consists of 266 Hall bar elements, and its nominal value has only 0.0342 × 10 -6 difference based on R K-90 ( = 25 812.807 Ω) from an integer value of 10 4 . As a result of comparison measurements with the conventional Quantized Hall Resistance Standard via the 100- Ω standard resistor, the value of the QHARS device agrees with its nominal value within 3.5 × 10 -8 .