Old Web
English
Sign In
Acemap
>
Paper
>
Fully Three-Dimensional Silicon-Integrated Dielectric Capacitor at 1 µFmm-2 for on-Chip Energy Storage
Fully Three-Dimensional Silicon-Integrated Dielectric Capacitor at 1 µFmm-2 for on-Chip Energy Storage
2021
Alessandro Paghi
L. M. Strambini
Stefano Mariani
Anjali Sood
Jesse Kalliomaki
Päivi Järvinen
Fabrizio Fausto Renzo Toia
Mario Scurati
Marco Morelli
Alessio Lamperti
Giuseppe Barillaro
Keywords:
Dielectric
Optoelectronics
Energy storage
Materials science
Capacitor
Silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]