Recent progress and future trends in MOCVD growth technology for light emitting diodes

To enable LED technology we developed the MOCVD technology for III-As/P/N based structures in reactors ranging from small scale to large production scale Planetary Reactors. The closed coupled showerhead reactor series (CCS reactor) and the Planetary Reactor® developed in parallel and both gave production proven results. The focus of epitaxy production technology developments has been put on improved process control, productivity enhancements, in-situ metrology for smart system control and predictive maintenance. A comprehensive summary and recent progress will be reported here. The application of the underlying physical, technical and chemical fundamentals explain the engineering concept.