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A Posture and Position Sensing Technique by Using the Light Diffracted from a Lithographic Mark
A Posture and Position Sensing Technique by Using the Light Diffracted from a Lithographic Mark
1991
Masafumi Ito
Hisao Kawaguchi
Kazuhiro Hane
Fumio Matsuda
Toshio Goto
Keywords:
Lithography
Computer vision
Diffraction
Computer science
Artificial intelligence
Optics
Correction
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