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Area-selective deposition of BCl 3 on Si(100) for B-doped δ-layer device fabrication
Area-selective deposition of BCl 3 on Si(100) for B-doped δ-layer device fabrication
2021
Kevin Dwyer
Azadeh Farzaneh
Sungha Baek
Michael Dreyer
Robert J. Butera
Keywords:
Optoelectronics
Fabrication
selective deposition
Materials science
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