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Electrical Characterization of a Triple Self-Aligned Split-Gate Flash Cell for 0.18 μm Embedded Application
Electrical Characterization of a Triple Self-Aligned Split-Gate Flash Cell for 0.18 μm Embedded Application
2000
Jiang Yan
Christian Gruensfelder
Andreas Schmidt
Kisang Kim
Rebecca D. Mih
Jay Harrington
Kevin M. Houlihan
Hyun Koo Lee
Kevin K. Chan
Jeffrey B. Johnson
Bomy A. Chen
Connie Lo
Dana Lee
Amitay Levi
Chung H. Lam
Danny Shum
Keywords:
Nanotechnology
Electronic engineering
Materials science
embedded applications
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