Influence of annealing on the optical properties and chemical and phase compositions of tungsten-oxide films

The results of investigating the optical properties, chemical composition, and crystal structure of tungsten-oxide films annealed in vacuum and air at 700°C are presented. The films are deposited by means of reactive dc magnetron sputtering. The samples involving single films, as well as heterostructures with tungsten- and titanium-oxide films, located on quartz glass substrates are examined. It is ascertained that, in different samples, annealing leads to different changes in the optical properties, chemical composition, and crystal structure of the films.