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Hydrogenated amorphous silicon films by chemical vapor deposition
Hydrogenated amorphous silicon films by chemical vapor deposition
1985
Ting L. Chu
Shirley S. Chu
S. T. Ang
D. C. Lo
A. Duong
Keywords:
Amorphous solid
Electrical resistance and conductance
Chemical vapor deposition
Amorphous silicon
Nanocrystalline silicon
Inorganic chemistry
Thermal decomposition
Ceramic materials
Amorphous carbon
Materials science
Combustion chemical vapor deposition
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