Method of manufacturing solar cell amorphous silicon
1981
METHOD FOR PRODUCING AMORPHOUS SILICON SOLAR CELLS, WHICH FORM ON A LAYER OF AMORPHOUS SILICON ON SUBSTRATE CHARACTERIZED IN WHAT WE DO VARY SUBSTRATE TEMPERATURE DURING OPERATION OF DEPOSIT SILICON LAYER aMORPHOUS, SO THAT ITS TEMPERATURE IS LOWEST DURING THE FILING OF THE PART OF THE aMORPHOUS SILICON LAYER AWAITING INCIDENT LIGHT.
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