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Effect of nitriding on the radiation-induced change in the electrical properties of silicon-based MIS structures
Effect of nitriding on the radiation-induced change in the electrical properties of silicon-based MIS structures
1993
P. V. Kuchinskii
V. M. Lomako
A. P. Petrunin
S. P. Patrakeev
I. N. Surikov
L. N. Shakhlevich
A. Tybulewicz
Keywords:
Chemistry
Surface states
Condensed matter physics
Nitriding
Radiation-Induced Change
Silicon
semiconductor materials
Engineering physics
Nuclear chemistry
silicon based
Correction
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