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Investigations on metastable helium atoms in a capacitively coupled plasma in a mixture of He, Ar and CF4
Investigations on metastable helium atoms in a capacitively coupled plasma in a mixture of He, Ar and CF4
2010
Wen-Cong Chen
Dirk Luggenh "olscher
Jiang Li
Feng Xie
Fei-Xiang Liu
Xi-Ming Zhu
Yi-Kang Pu
Keywords:
Helium
Atomic physics
Capacitively coupled plasma
Metastability
Atom
Chemistry
Materials science
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