Measuring the thickness of organic/polymer/biological films on glass substrates using spectroscopic ellipsometry
2006
In this work we discuss a method of determining film thickness for film/substrate combination where the index of refraction of the film and substrate in the transparent spectral regions is almost identical. Common examples of this situation are organic/polymer/biological films on glass substrates. Infrared ellipsometry is used and we use weight gain to provide some necessary additional information for determining the optical functions for the film material. The spectral regions of strong molecular vibrations are then used for determining film thickness.
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