Calculation of parameters of krypton plasma excited by electron beam with additional heating by high-frequency electric field

The electron energy-distribution functions, the rates of plasmochemical reactions, and the densities of various plasma components have been calculated for a microwave discharge (f = 1000 MHz, P = 100–700 mW) in krypton plasma (p = 0.5 atm) excited by an electron beam with an energy of 12 keV. It has been found that the heating by a microwave field shifts the peak of the electron energy-distribution function (EEDF) from 0.5 to 2 eV, which leads to higher rates of reactions with excitation thresholds lying near the EEDF peak. As a result, the population of excited levels increases by two to three times.