Extended Bandwidth Piezoelectric Lorentz Force Magnetometer Based on a Mechanically Coupled Beam Resonator Array

We present a piezoelectric-on-silicon Lorentz force magnetometer (LFM) based on a mechanically coupled array of clamped–clamped beam resonators for the detection of lateral ( $xy$ plane) magnetic fields with an extended operating bandwidth of 1.36 kHz. The proposed device exploits piezoelectric transduction to greatly enhance the electromechanical coupling efficiency, which benefits the device sensitivity. Coupling multiple clamped–clamped beams increases the area for piezoelectric transduction, which further increases the sensitivity. The reported device has the widest operating bandwidth among LFMs reported to date with comparable normalized sensitivity despite the quality factor being limited to 30 when operating at ambient pressure instead of vacuum as in most cases of existing LFMs.