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DEVELOPMENT OF PHOTOELECTRON-ASSISTED CHEMICAL VAPOR DEPOSITION
DEVELOPMENT OF PHOTOELECTRON-ASSISTED CHEMICAL VAPOR DEPOSITION
2017
Hiroshi Tani
Yasuo Sakane
Shinji Koganezawa
Masashi Ishikawa
Norio Tagawa
Keywords:
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Deposition (phase transition)
Plasma processing
Combustion chemical vapor deposition
Inorganic chemistry
Materials science
Chemical engineering
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