High frequency transmission line using micromachined polymer dielectric

A micromachined transmission line for microwave and millimetre-wave applications has been fabricated and characterised in the 20-40 GHz range. Using this topology, the direct integration of both mesa and discrete devices is possible making the line suitable for MIC and MMIC applications. This structure can also be used as an alternative to pre-formed substrates for millimetre-wave MIC circuits.