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Implementation of a Monolithic Three-Axis Accelerometer Using an Improved CMOS MEMS Process
Implementation of a Monolithic Three-Axis Accelerometer Using an Improved CMOS MEMS Process
2018
S.H. Tseng
Y-J. Wang
C Y Yeh
H.H. Tsai
Y.-Z. Juang
Keywords:
Electrical engineering
three axis accelerometer
cmos mems
Materials science
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