Twenty five years' dry vacuum pumping
2009
Dr Andrew Chew, market and applications development manager at Edwards, looks at the important development of the dry, oil-free vacuum pump, which solved the back streaming problems that had previously plagued major industry sectors for years – metallurgy, vacuum drying and semiconductor manufacture among them.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI